主要設備

(依機器年齡排序)

1. W-EPMA:                                                                                     [近期使用記錄]
熱發射(鎢絲)電子微探分析儀(JEOL W-EPMA: JXA8900-R)配備有四種頻道的波長分散式光譜儀:自1993(電腦系統和WDS於2001-2003設置)。 [photo 1];

2. LVSEM with EDS, CL and EBSD:                          [操作手冊]        [近期使用記錄]
熱發射(鎢絲)低真空類型掃描式電子顯微鏡(JEOL W-LVSEM: JSM-6360LV since April 2003),配備有能量分散式光譜儀(EDS: Oxford EDS: since November 2012)、陰極螢光影像系統(CL)(Gatan mini-CL: since Jan. 200) [photo 2];

3. FE-EPMA:                                                                                     [近期使用記錄]
場發射電子微探儀(JEOL FE-EPMA: JXA8500F),配備有五個頻道的WDS(since July 2008)。 [photo 3].

4. FE-SEM:                                                                                    [近期使用記錄]
場發射掃描式電子顯微鏡(JEOL FE-SEM: JSM-7100F since November 2012)配備有能量分散式光譜儀(EDS: Oxford EDS: since November 2012)、和電子背散射繞射分析儀(EBSD)(HKL Channel-5: since June 2008)[photo 4]

 

 

樣本準備室儀器 [樣本準備流程]

1. 切割機: 

    (1) Struers: Minitom

    (2) Buehler: Isomet 5000-Linear Precision Saw

2. 真空鑲埋機: Struers: Citovac

3. 拋光機:

    (1) Struers: DAP-V

    (2) [Struers: LaboPol-6 with LaboForce-3]

    (3) [Buehler: VibroMet 2]

4. 鍍碳鍍金機:

    (1) SPI: SPI-Module Control

    (2) Quorum: Q150T E

 

儀器目前使用狀況

updated: 27-May-2013

facilities
state
functions ………
LV-SEM
 
in operation
 
HV/LV W-imaging
CL
full CL spectrum imaging
EDS
qualitative, quantitative, mapping
W-EPMA [4ch-WDS]
in operation
W-imaging, qualitative, quantitative, mapping
FE-EPMA [5ch-WDS]
in operation
FE-imaging, qualitative, quantitative, mapping
FE-SEM  
in operation
 
HV/LV FE-imaging
CL
full CL spectrum imaging
EDS
qualitative, quantitative, mapping
EBSD
Repair DP imaging, phase ID, mapping with EDS

 

                       

W-EPMA

Photo 1: W-EPMA

Photo 2: SEM

fe-epma

Photo 3: FE-EPMA

Photo 4: FE-SEM