Major Equipments

(in order of machine age)

1.W-EPMA:                                                                                [Recent Operation]
A thermal emission (W-filament) electron probe micro analyzer (JEOL W-EPMA: JXA8900-R) with four channeled wavelength dispersive X-ray spectrometers (WDS): since 1993 (Computer system and WDS were customized in 2001-2003) [photo 1];

2.LVSEM with EDS, CL and EBSD:          [Operation Manual]  [Recent Operation]
A thermal emission (W-filament) low-vacuum type scanning electron microscope (JEOL W-LVSEM: JSM-6360LV since April 2003) which equipped with an energy dispersive X-ray spectrometer (EDS: Oxford EDS: since April 2003 and customized in June 2008), a cathodoluminescence (CL) image detector (Gatan mini-CL: since Jan. 2005).

3.FE-EPMA:                                                                               [Recent Operation]
A field emission electron probe micro analyzer (JEOL FE-EPMA: JXA8500F) with five channeled WDSs (since July 2008) [photo 3].

4.FE-SEM:                                                                                 [Recent Operation]

A field emission scanning electron microscope (JEOL FE-SEM: JSM-7100F Since November 2012) which equipped with an energy dispersive X-ray spectrometer (EDS: Oxford EDS: Xmax 80),a Cathodoluminescence (CL) and  Backscatter detector (BSE) (Centaurus Scintillator CL & Backscattered Electron Detector since May. 2013)and an electron back-scattered diffraction meter (EBSD) (HKL Channel-5: since June 2008)

Sample Preparation Equipments [Procedures]

1. Cutter

    (1) Struers: Minitom

    (2) Buehler: Isomet 5000-Linear Precision Saw

2. Vacuum Impregnation: Struers: Citovac

3. Polisher:

    (1) Struers: DAP-V

    (2) [Struers: LaboPol-6 with LaboForce-3]

    (3) [Buehler: VibroMet 2]

4. Coater:

    (1) SPI: SPI-Module Control for Au, Pt and C

    (2) Quorum: Q150T E for C

 

 

Current Status

Condition of EPMA Lab @ Institute of Earth Sciences, Academia Sinica, Taipei

updated: 27-May-2013

facilities
state
functions ………
LV-SEM
in operation
HV/LV W-imaging
CL
in operation
full CL spectrum imaging
EDS
in operation
qualitative, quantitative, mapping
W-EPMA [4ch-WDS]
in operation
W-imaging, qualitative, quantitative, mapping
FE-EPMA [5ch-WDS]
in operation
FE-imaging, qualitative, quantitative, mapping
FE-SEM
in operation
HV/LV FE-imaging
CL
full CL spectrum imaging
EDS
qualitative, quantitative, mapping
EBSD

Repair

DP imaging, phase ID, mapping with EDS

 

 


 

 

W-EPMA

Photo 1: W-EPMA

SEM

Photo 2: SEM

fe-epma

Photo 3: FE-EPMA